Value Vacuum Pump

Pan Semiconductor

Pan Semiconductor

The manufacturing process of semiconductor components is extremely complex, including a large number of steps that must be carried out under vacuum conditions, and different technologies have specific requirements for vacuum levels. If any leak occurs in semiconductor tools and their associated facilities, it will seriously affect production and yield, which may lead to a decline in production, failure to meet processing specifications, and even cause major safety risks.

Value focuses on semiconductor cleaning applications and launches the world's smallest air-cooled screw pump, dry pump and unit solution. The design of this solution can effectively reduce the acquisition cost and extend the process life, providing strong guarantee and efficient support for semiconductor component manufacturing.

Applicable Product Solutions